Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Tracking control of a monolithic piezoelectric nanopositioning stage using an integrated sensor

- Omidbeike, Meysam, Teo, Yik R., Yong, Yuen K., Fleming, Andrew J.

MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design

- Maroufi, Mohammad, Fowler, Anthony G., Reza Moheimani, S. O.

MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy

- Maroufi, Mohammad

Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing

- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza

Sensorless damping control of a high speed flexure guided nanopositioner

- Fairbairn, Matthew W., Wadikhaye, Sachin P., Moheimani, S. O. Reza

Design of an inertially counterbalanced z-nanopositioner for high-speed atomic force microscopy

- Yong, Y. K., Mohemani, S. O. R.

Design, modeling, and FPAA-based control of a high-speed atomic force microscope nanopositioner

- Yong, Yuen Kuan, Bhikkaji, Bharath, Moheimani, S. O. Reza

Sensor fusion for improved control of piezoelectric tube scanners

- Fleming, Andrew J., Wills, Adrian G., Moheimani, S. O. Reza